Mikko Ritala

Mikko Ritala, Professor of Inorganic Materials Chemistry, Atomic Layer Deposition, ALD

Department of Chemistry, University of Helsinki; address: A. I. Virtasen aukio 1, Helsinki, FIN-00014, Finland: phone: +358-9-19150207: fax: +358-9-19150198

Partners Tyndall National Institute Dr Simon Elliott (project coordinator), Dr Paul Hurley University of Helsinki Prof. Mikko Ritala

Session III, Chair: Prof. Mikko Ritala 13:30 7 Scandium precursor reactivity with water and ozone by quantum chemical calculations, Anthony Reilly, Simon D. Elliott, Tyndall National ...

Atomic layer deposition of metals and metal oxide dielectrics for DRAM capacitors, Kaupo Kukli, Mikko Ritala, Markku Leskelä, Jaan Aarik ...